Product Description
- 208VAC, 3 Phase, 60HZ, 100 AMP 5 Wire
- 5.5 GPM
- 100 PSI Air
- Water Cooled Bell Jar
- Dual 5KVA SCR Thermal Evaporation Power Supply
- IC Deposition Control
- Dimensions: 30″ Dia x 36″ Tall
- Condition: Good (As-Is)
Please contact our sales department for more details:
Lassen High Vacuum, Inc. 1059 Wright Ave, Suite A, Mountain View, CA 94043 Tel: 650-961-5551 Fax: 650-961-5556
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